A passive mechanism for thermal stress regulation in micro-machined beam-type structures

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Bibliographic Details

Published in:	Microsystem technologies. - Springer-Verlag, 1994. - 18(2012), 5 vom: 31. März, Seite 543-556
Main Author:	Hassanpour, Pezhman A. (Author)
Other Authors:	Nieva, Patricia M. (Author) Khajepour, Amir (Author)
Format:	electronic Article
Language:	English
Published:	2012
ISSN:	1432-1858
External Sources:	lizenzpflichtig