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Hassanpour, Pezhman A.
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Hassanpour, Pezhman A.
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A passive mechanism for thermal stress regulation in micro-machined beam-type structures
by:
Hassanpour
,
Pezhman
A
.
Published in:
Microsystem technologies
(2012)
lizenzpflichtig
electronic Article
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Related Subjects
Axial Force
Electrostatic Force
Mode Shape
Residual Stress
Thermal Sensitivity
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