A Study of Interfacial Wettability of Glass Spreading on a Silicon Substrate

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Bibliographic Details

Published in:	Journal of electronic materials. - Springer US, 1972. - 51(2022), 10 vom: 04. Aug., Seite 5818-5831
Main Author:	Yang, Chenqian (Author)
Other Authors:	Zhang, Yichong (Author) Li, Ling (Author) Qin, Chao (Author) Bai, Jintao (Author) Wang, Hui (Author) Ma, Shenghua (Author)
Format:	electronic Article
Language:	English
Published:	2022
ISSN:	1543-186X
External Sources:	lizenzpflichtig