Determination of residual stresses in a single crystalline 3C-SiC micro-fabricated structure using FE model and measured resonance frequencies

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Bibliographic Details

Published in:	Microsystem technologies. - Springer-Verlag, 1994. - 18(2012), 3 vom: 07. Feb., Seite 319-324
Main Author:	Hassan, Musaab (Author)
Format:	electronic Article
Language:	English
Published:	2012
ISSN:	1432-1858
External Sources:	lizenzpflichtig