Identification of mechanical defects in MEMS using dynamic measurements for application in production monitoring

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Bibliographic Details

Published in:	Microsystem technologies. - Springer-Verlag, 1994. - 16(2010), 7 vom: 05. Jan., Seite 1251-1257
Main Author:	Gerbach, Ronny (Author)
Other Authors:	Ebert, Matthias (Author) Brokmann, Geert (Author) Hein, Thomas (Author) Bagdahn, Joerg (Author)
Format:	electronic Article
Language:	English
Published:	2010
ISSN:	1432-1858
External Sources:	lizenzpflichtig