Microsystem technologies sensors, actuators, system integration ; research journal

Microsystem technologies : sensors, actuators, system integration ; research journal

Bibliographic Details
Format: eJournal
Language:English
Published: Berlin ; Heidelberg : Springer, 1994-
Physical Description:Online-Ressource
ISSN:1432-1858
0946-7076
Subjects (GND):
Mikrosystemtechnik ;
Zeitschrift ;
Online-Ressource
Genre:
Zeitschrift
External Sources:https://ezb.ur.de/?1476561-5
http://link.springer.com/journal/542
Deutschlandweit zugänglich
Other Editions:Erscheint auch als (Druck-Ausgabe): Microsystem technologies . - Berlin : Springer, 1994
Title Published by
High aspect ratio structures obtained by electroforming in microstructured glass 1996
Microgrippers created in microstructurable glass 1997
Fatique of directly wafer-bonded silicon under static and cycling loading 2001 Bagdahn, Jörg, 1971-
Analysis of self-heating phenomenon of piezoelectric microcomponents actuated harmonically 2002 Keoschkerjan, Ruben
Exposure of photosensitive glasses with pulsed UV-laser radiation 2002
A new approach for handling and transferring of thin semiconductor materials 2003 Bagdahn, Jörg, 1971-
A 3D-CAM system for quick prototyping and microfabrication using excimer laser micromachining 2005 Mutapcic, Emir
A basic study of a face-to-face image presentation system 2005 Ohnishi, Masatoshi
A design based on final-state control for residual vibrationless seeking in hard disk drives 2005 Okuyama, Atsushi
A method for calculating the electromagnetic noise of a motor-driven thin blade fan 2005 Ota, H.
A methodology to extract dynamic compact thermal models under time-varying boundary conditions: application to a thermopile based IR sensor 2005 Salleras, M.
A microfluidic gel valve device using reversible sol–gel transition of methyl cellulose for biomedical application 2005 Yoon, Dae Sung
A new direct Seek Control Design of Optical Disk Drives 2005 Dong, Fengdan
A novel laser bump design for low glide/low stiction disk 2005 Hsu, T. C.
A novel technique for the fabrication of herringbone grooves in a dynamic thrust bearing combining UV-LIGA with electro-discharge machining 2005 Kuo, J. S.
A parametric study on rocking vibration of hard disk drive spindle motors with fluid-dynamic bearings and rotating-shaft design 2005 Heo, Baekho
A piezoelectric micro-actuator with extended base-plate for HDD 2005 Lau, Gih Keong
A pivot nonlinearity compensation by use of variable structure estimator for hard disk drives 2005 Ohno, Keitaro
A quantitative study on the adhesion property of cured SU-8 on various metallic surfaces 2005 Dai, Wen
A quick intelligent control system for a mobile robot to avoid collision with moving obstacles 2005 Yang, Weihong
A quick intelligent control system for a mobile robot to avoid collision with moving obstacles 2005 Yang, Weihong
A study of integration of LIGA and M-EDM technology on the microinjection molding of ink-jet printers’ nozzle plates 2005 Tseng, Shi-Chang
A study on the coupled dynamic characteristics for a torsional micromirror 2005 Zhao, Jian Ping
A test structure for characterization of the interface energy of anodically bonded silicon-glass wafers 2005 Knechtel, R.
A variotherm mold for micro metal injection molding 2005 Fu, G.
Active-head sliders using piezoelectric thin films for flying height control 2005 Suzuki, Kenji
Aerodynamically induced power loss in hard disk drives 2005 Cho, Sung-Oug
An adaptive notch filter for suppressing mechanical resonance in high track density disk drives 2005 Kang, Chang-Ik
An effective method of determining the residual stress gradients in a micro-cantilever 2005 Zhang, Yin
An iterative learning approach to compensation for the servo track writing error in high track density disk drives 2005 Kang, Chang-Ik
An optimal design of magnetic actuators using topology optimization and the response surface method 2005 Yoo, J.
Analysis of laminar convective heat transfer in micro heat exchanger for stacked multi-chip module 2005 Kang, Moon Koo
Anodic bonding of glass to aluminium 2005 Schjølberg-Henriksen, K.
Antenna stabilizing control system using a strapdown 2-axis Azimuth/Elevation method 2005 Murakoshi, Takao
Application of an optimization methodology for multidisciplinary system design of microgyroscopes 2005 Yuan, Weizheng
Application of micromechanical resonant structures for measuring the sealing of bonded sensor systems 2005 Frömel, J.
Arrays of addressable contactless optical microshutters 2005 Gonseth, Stéphan
Automated surface micro-machining mask creation from a 3D model 2005 Schiek, Richard L.
Automatic classification of ambulatory movements and evaluation of energy consumptions utilizing accelerometers and a barometer 2005 Ohtaki, Yasuaki
Basic study on filtering using the frequency characteristics of reflected waves from underground radar 2005 Sudo, Yoshikazu
Behavioral VHDL-AMS model and experimental validation of a nuclear magnetic resonance sensor 2005 Megherbi, S.
Bio-MEMS fabricated artificial capillaries for tissue engineering 2005 Wang, G. J.
Contact force detection on a minute aperture mounted optical contact slider using an acoustic emission sensor 2005 Ohkubo, Toshifumi
Corrected expression of the van der Waals pressure for multilayered system with application to analyses of static characteristics of flying head sliders with an ultrasmall spacing 2005 Matsuoka, H.
CVD-diamond-based thermocouple for high sensitive temperature measurements 2005 Balducci, A.
Design and analysis of anti-vibration system for the stylish dvd deck 2005 Park, Tae-Wook
Design and analysis of two-wire focusing actuator for small-sized ODD with linear VCM type’s actuator 2005 Lee, Dong-Ju
Design and fabrication of an electrothermal microactuator for multi-level conveying 2005 Wu, Chien-Tai
Design and fabrication of poly(dimethylsiloxane) electrophoresis microchip with integrated electrodes 2005 Liu, C. C.
Design and manufacturing of micromechanism elements of 2-DOF micromanipulator 2005 Kamiya, Daiki
Design of an integrated optical pickup with NA of 0.85 for small form factor optical disk drives 2005 Sohn, J. -S.
Design of optical path of pickup for small form factor optical disk drive 2005 Jung, K.-S.
Design of servo control systems with quadratic optimal control and observed-state feedback control for mems-based storage device 2005 Jeon, Hongjun
Design of suspension and swing arm for improved shock resistance in the micro optical disk drives 2005 Hong, E. J.
Design of swing arm type actuator and suspension for micro optical disk drive 2005 Hong, E.-J.
Design of wafer-based NA 0.85 micro objective lens and integrated pick up module for small sized optical drive 2005 Kim, Y.-S.
Design, Test, Integration and Packaging of MEMS/MOEMS, 2004 2005 Michel, Bernd
Development of a low cost hybrid Si/PDMS multi-layered pneumatic microvalve 2005 Thuillier, Gaël
Development of a micromanipulator made of diamond having reversal mechanism 2005 Nakazato, Yuichi
Development of a wrist-worn calorie monitoring system using bluetooth 2005 Sugimoto, Chika
Development of an optical flying head for a next-generation magneto-optical recording system 2005 Kawasaki, Goroh
Development of an optical stylus displacement sensor for surface profiling instruments 2005 Fukatsu, Hiroya
Development of X-beam electrothermal actuators 2005 Lee, Chengkuo
Direct bonding with on-wafer metal interconnections 2005 Jia, C.
Disk drive generates high speed real random numbers 2005 Schreck, Erhard
Dynamic analysis of a HDD spindle system with FDBs due to the bearing width and asymmetric grooves of journal bearing 2005 Jang, G. H.
Dynamic analysis of torsional resonance mode of atomic force microscopy and its application to in-plane surface property extraction 2005 Song, Yaxin
Dynamic characteristic of miniature molding pantograph mechanisms for surface mount systems 2005 Ishii, Yuki
Dynamic characteristics of flying head slider with ultra thin spacing (CIP method and linearized method) 2005 Fukui, Shigehisa
Dynamic meniscus models for MEMS elements 2005 Matsuoka, H.
Effect of interfacial $ SiO_{2} $ thickness for low temperature $ O_{2} $ plasma activated wafer bonding 2005 Olbrechts, Benoit
Effect of mechanical design of the suspension on dynamic loading process 2005 Suk, M.
Effect of thermal deformations of an optical pick-up base on the optical properties of DVD optical system 2005 Kim, Hongmin
Electronic Mosquito: designing a semi-invasive Microsystem for blood sampling, analysis and drug delivery applications 2005 Gattiker, Giorgio E.
Electrostatically driven synthetic microjet arrays as a propulsion method for micro flight 2005 Parviz, Babak A.
Electrostatically driven synthetic microjet arrays as a propulsion method for micro flight 2005 Parviz, Babak A.
Evaluation of ultraviolet assisted bonding between lubricant and diamond-like carbon through spreading of molecularly thin perfluoropolyether lubricant 2005 Mitsuya, Y.
Examination of flying height of magnetic head slider in simulations and measurements at nanometer-order spacing 2005 Takeuchi, Yoshinori
Excitation pulse shape effects in drop test simulation of the actuator arm of a hard disk drive 2005 Shi, B. J.
Experiment design and UV-LIGA microfabrication technology to study the fracture toughness of Ni microstructures 2005 Dai, Wen
Experimental measurements and behavioral modeling of an electrostatically actuated bi-axial micromirror 2005 Parrain, Fabien
Experimental studies and simulation for air flow on rotating drum in helical scan system 2005 Hasegawa, Kenji
Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry 2005 Oosterbroek, R. E.
Fabrication and optimization of bimorph micro probes for the measurement of individual biocells 2005 Cho, Y. H.
Fabrication of a rotary micromirror for fiber-optic switching 2005 Hu, M.
Fabrication of an accurately vertical sidewall for optical switch applications using deep RIE and photoresist spray coating 2005 Ikehara, T.
Fabrication of microfluidic networks with integrated electrodes 2005 Hermes, D. C.
Fabrication of microlens array with graduated sags using UV proximity printing method 2005 Yang, H.
Feature length-scale modeling of LPCVD and PECVD MEMS fabrication processes 2005 Musson, Lawrence C.
FEM analysis of multilayered MEMS device under thermal and residual stress 2005 Park, Jun-Hyub
Finite element method analysis and control of micro actuator with piezoelectric element for spinstand 2005 Naganawa, Akihiro
Finite element modal analysis of a rotating disk–spindle system in a HDD with hydrodynamic bearings considering the flexibility of a complicated supporting structure 2005 Jang, G. H.
Finite element modal analysis of a spinning flexible disk-spindle system in a HDD considering the flexibility of complicated supporting structure 2005 Jang, G. H.
Flow resistance of a liquid droplet confined between two hydrophobic surfaces 2005 Suzuki, Kenji
Flying characteristics in the free molecular region (influence of accommodation coefficients) 2005 Fukui, Shigehisa
Friction and wear study of the hemispherical rotor bushing in a variable capacitance micromotor 2005 Zhang, Wen-Ming
Friction control by micro-vibration of a magnetic recording head under micro-load 2005 Su, Lizhi
Gentle cell handling with an ultra-slow instrument: creep-manipulation of cells 2005 Thielecke, H.
Glass frit bonding: an universal technology for wafer level encapsulation and packaging 2005 Knechtel, Roy