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Author:
Wang, Tao
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Wang, Xin
Suggested Topics:
Chemical reactive etching
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Author:
Wang, Tao
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Wang, Xin
Suggested Topics:
Chemical reactive etching
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Chemical reactive etching
Etching mechanism
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Physical bombardment
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Polymer film
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Investigation on Localized Etching Behaviors of Polymer Film by Atmospheric Pressure Plasma Jets
by:
Wang, Tao
Published in:
Plasma chemistry and plasma processing
(2023)
lizenzpflichtig
electronic Article
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electronic Article
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Li, Meng
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Wang, Shengquan
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Wang, Tao
Wang, Xin
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